W-357BM series [High-frequency separate type]
Submicron particle is removed by 1 MHz ultrasonic cleaner
Overview
Applications
・Magnetic head cleaning
・Silicon wafer cleaning
・Cleaning of sapphire wafers
・Cleaning of semiconductor devices after processing
・Hard disk cleaning
・Cleaning of aluminum and mirror-polished product which is easily damaged
Targeted contamination
・Particles
・Flux
・Chemicals
Special feature
・Digital control enables stable oscillation.
・Various interfaces enable control according to the cleaning system.
・Ultrasonic output can be adjusted in 1W increments.
Specifications
Generator
| Model | W-357BM-600 | W-357BM-1200 | |
| Oscillation method | Single Frequency Oscillation | ||
| Rated output | 600W | 1200W | |
| Output variable range | 100W~600W | 200W~1200W | |
| Nominal oscillation frequency | 1MHｚ | ||
| Power input | AC200V〜240V Single phase 50/60Hz 1200VA |
AC200V〜240V Single phase 50/60Hz 2400VA |
|
| Display | VFD (fluorescent display tube) 16 characters x 2 lines | ||
| Interface | Analog output | 4-20mA current output | |
| Contact output | 3 points Alarm output, oscillation detection output, power ON output | ||
| External drive input | 2 points Sensor input, Remote input | ||
| RS485 communication | MODBUS® protocol, RTU mode *1 | ||
| External Dimensions （Excluding protruding parts, including rubber feet） WxDxHmm |
220×360×143 | 360×360×143 | |
| Weight | 5kg | 7kg | |
●Ambient operating environment: Temperature: 5~40℃, Humidity: 5~80% (no condensation)
●Power cable length: 3m
*1 MODBUS is a registered trademark of Schneider Electric USA Inc.
Transducer Unit
Custom-made transducer units are available upon request.
・Maximum allowable input: 600W/1200W/1800W/2400W/3000W/3600W
・Compatible wafers: 6 inches / 8 inches / 12 inches
F Type ｜ Vibration plate type
| Model |
W-357BM-600F |
W-357BM-1200F |
| Oscillator Type | W-357BM-600 | W-357BM-1200 |
| Maximum allowable input | 600W | 1200W |
| Nominal drive frequency | 1MHｚ | |
| Effective cleaning surface W×Dmm |
135×160 | 272×154 |
| External Dimensions W×D×Hmm （Wiring and piping not included） |
250×220×68 | 355×245×68 |
| Material | Plate: SUS316L, surface electrolytic polishing | |
| Weight | 3.3kg | 7kg |
| Wafer size | 6 inch | 8 inch |
| Transducer cable length | 5m | 5m×2 |
●Liquid contact surface material: Vibration Plate : SUS316L
●Liquid temperature range: 5 to 80°C
●Transducer: PZT
S Type ｜ Tank Type
| Model | W-357BM-600S | W-357BM-1200S | |
| Oscillator Type | W-357BM-600 | W-357BM-1200 | |
| Maximum allowable input | 600W | 1200W | |
| Nominal drive frequency | 1MHｚ | ||
| Effective cleaning surface W×Dmm |
135×160 | 135×160 2 locations | |
| Dimensions W×D×Hmm （Excluding protruding parts） |
Externals | 302×296×372(Including rubber feet） | 496×336×372(Including rubber feet） |
| Inside a tank | 248×236×252 | 442×276×252 | |
| Material | Tank: SUS316L Packing: Viton, PTFE | ||
| Drain valve | 1/2 inch | ||
| Weight | 11.6kg | 18kg | |
| Wafer size | 6 inch | 6 inch ×2 | |
| Transducer cable length | 5m | 5m×2 | |
●Liquid contact surface material: Vibration Plate, tank: SUS316L Packing: PTFE Water supply/drainage nipple: SUS304
●Liquid temperature range: 5 to 80°C
●Transducer: PZT
