HLF800 series [Ultrasonic Flowmeter]

HLF800 series [Ultrasonic Flowmeter]

Overview

Equipped with a DSP (Digital Signal Processor), the unique signal computation ensures stable measurement.

Ultrasonic waves are used to measure the fluid velocity and calculate the flow rate from the velocity.
The flow velocity is calculated from the difference in ultrasonic wave propagation time when ultrasonic waves are emitted in the forward and reverse directions from the sensors installed upstream and downstream of the flow, and is converted to flow rate.

○Flow measurement is possible under the condition of minimum pressure loss because there is no structure in the piping.
○Wide range of flow velocity can be measured from low to high velocity.

Special feature

Bubble effect

●Equipped with a DSP (Digital Signal Processor), the unique signal computaion ensures stable measurement.

sensors

● Two different sizes of sensors can be connected to the same converter.

Up to two sensors can be connected to one converter, which saves space and offers excellent cost performance for equipment that measures flow rates at multiple locations. In addition to flow measurement of different fluids, sensors in different sizes can also be connected.

VFD display

●Equipped with VFD display

The VFD (fluorescent display tube) display provides excellent visibility. HLF820 only.

High-temperature chemical flow measurement

●High-temperature chemical flow measurement

Compatible with recent diversification of chemical and fluid temperatures. All liquid contact surfaces are made of NEW PFA for superior chemical resistance. Our self-developed transducers enable flow measurement at high temperature of up to to 200°C (K type).
*04 type is available up to 180°C.

detachable cable

●Easy wiring work by detachable cable

Since the wiring cable from the sensor unit is detachable, wiring can be done smoothly after installation in the device. The cable length can be selected from 5m and 7m.

RS-485 communication

●RS-485 communication enables remote monitoring with a PC

RS-485 communication is standard-equipped. Parameter setting and reading out of measurement data can be done on a PC by using the management software (HLF800 Monitor), enabling remote flow monitoring.

Applications

・Measuring the flow of deionized water or ultrapure water for semiconductor manufacturing processes
・Measuring the flow of highly corrosive chemical liquid used in chemical treatment processes
・Measuring the flow of slurry liquids for CMP (Chemical Mechanical Polishing) process

Specifications

Sensor type

Sensor type

Converter

Model HLF810 HLF820
Measurement method Ultrasonic wave propagation time difference method
Data update cycle 0.01 seconds
Power Voltage DC24V ±10%(21.6～26.4V)
Power consumption Approx. 4W Approx. 5W
Display - VFD (fluorescent tube) 16 characters x 2 lines
Digital input Open collector input or no-voltage contact input 2 points
Select from totalizer reset or zero point adjustment
Output 4-20mA current output 2 points
Resolution: 12bit (Max. load resistance 600Ω)
Digital output Open collector output (MAX35V/0.1A) 2 points
Select from comparison, integrated pulse, instantaneous frequency, and error output
Interface RS-485 (MODBUS protocol, RTU mode)
32 units can be concatenated (addresses 1-32)
Communication speed: 9600, 19200, 38400, 57600 bps
Case Material ABS
Ambient operating temperature 0 to 50°C (no condensation)
Weight 130ｇ 230g
Installation method DIN Rail Panel

Sensor

Model HLFS01-04 HLFS01-06
Object of measurement Ultrapure water / Pure water / Chemical solution
Measuring flow rate range 0～2L/min 0～6L/min
Connecting Tube Size 1/4" 3/8"
Accuracy*1 Measured flow rate 0 to less than 800 mL/min 800～2000mL/min 0 to less than 2000 mL/min 2000～6000mL/min
Flow rate accuracy ±8mL/min ±1% R.D. ±20mL/min ±1% R.D.
Withstanding pressure 0.5MPa (0～90℃) / 0.2MPa (90～200℃)
Fluid temperature Standard 0～90℃
High temperature 0～180℃ 0～200℃
Ambient operating temperature 0～80℃
Wetted part material NEW PFA
Weight 90g 110g
Intrinsic Loss Coefficient 3.7863 0.6937
Model HLFS01-08 HLFS01-12
Object of measurement Ultrapure water / Pure water / Chemical solution
Measuring flow rate range 0～20L/min 0～50L/min
Connecting Tube Size 1/2" 3/4"
Accuracy*1 Measured flow rate 0 to less than 4.3L/min

 4.3～20L/min 0 to less than 11.8L/min 11.8～50L/min
Flow rate accuracy ±43mL/min ±1% R.D. ±118mL/min ±1% R.D.
Withstanding pressure 0.5MPa (0～90℃) / 0.2MPa (90～200℃)
Fluid temperature Standard 0～90℃
High temperature 0～200℃
Ambient operating temperature 0～80℃
Wetted part material NEW PFA
Weight 130g 160g
Intrinsic Loss Coefficient 0.1146 0.0138
Model HLFS01-16
Object of measurement Ultrapure water / Pure water / Chemical solution
Measuring flow rate range 0～80L/min
Connecting Tube Size 1"
Accuracy*1 Measured flow rate 0 to less than 20 L/min 20～80L/min
Flow rate accuracy ±200mL/min ±1% R.D.
Withstanding pressure 0.5MPa (0～60℃) / 0.2MPa (60～200℃)
Fluid temperature Standard -
High temperature 0～200℃
Ambient operating temperature 0～80℃
Wetted part material NEW PFA
Weight 220g
Intrinsic Loss Coefficient 0.0033

*1 Pure water at 20°C Repeat accuracy in our inspection environment

Intrinsic loss coefficient A of each sensor (pure water at 20°C)
⊿P＝AQ2 ⊿P: Pressure loss [KPa] A: Intrinsic loss coefficient Q: Flow rate [L/min]

Converter-sensor connection cable

Model HLFS01 cable 5m HLFS01 cable 7m
Material ETFE
Length 5m 7m
Weight 150g 210g
PAGE TOP